PVD vacuum coating machine/lens coating machine

Performance/

Model

CAC-900

CAC-1000

CAC-1250

CAC-1400

CAC-1600

Size of coating chamber

900x1100mm

1000x1200mm

1250x1350mm

1400x1600mm

1600x1600mm

Power supply type

Arc power supply, filament power supply, pulse bias power supply

Structure of vacuum chamber

Vertical front door structure, rear air exhaust system and double-layer water cooling chamber

Material of vacuum chamber

superior stainless steel vacuum chamber

Limit vacuum

6.0x10^-4Pa (unload, clean vessel)

Extraction time

from atmosphere to 8.0*10^-3Pa ≤15 minutes

Vacuum pumping system

Diffusion pump or molecular pump + Roots pump + Mechanical pump + Holding pump

 (the specific model can be selected according to customer requirements)

Arc source

6 units or
8 units

8 units or
10 units

10 units or
12 units

14 units or
16 units

16 units or
18 units

Bias power supply

20KW/set

20KW/set

30KW/set

40KW/set

50KW/set

Rotating mode

of workpiece turntable

Planetary revolution and rotation, variable frequency speed regulation

 (controllable and adjustable)

Workpiece baking temperature

Controllable and adjustable from room temperature to 450°C

(PID temperature control)

Process gas

3-path or 4-path process gas flow control and display system, selective automatic gassing system

Cooling mode

Water circulation cooling mode, cooling water tower or industrial water cooler or deep cooling system. (Provided by customers)

Control mode

Manual/automatic integration mode, touch screen operation, PLC or computer control

Total power

30KW

35KW

45KW

60KW

75KW

Alarm and protection

Alarm water shortage, over current and overvoltage, open circuit and other abnormal conditions of pumps, targets and so on and execute relevant protective measures and electric interlock function

Equipment area

W2.5m*L3.5m

W3m*L4m

W4m*L5m

W4.5m*L6m

W5m*L7m

Other technical parameters

Water Pressure ≥0.2MPa, Water Temperature ≤25°C, Air Pressure 0.5-0.8MPa

Remarks

The specific configuration of coating equipment can be designed according to process requirements of coating products